Spin-on-glass (SOG) for the trilayer imaging process was written by Sugita, Hikaru;Saito, Akio;Konno, Keiji;Hayasui, Akihiro;Nishiyama, Satoru;Ebisawa, Masahiko;Nishikawa, Michinori;Ohta, Yoshihisa;Tominaga, Tetsuo. And the article was included in Journal of Applied Polymer Science in 2003.Formula: C7H14O3 The following contents are mentioned in the article:
Maleic acid catalyzed hydrolysis and condensation of tetramethoxysilane was carried out in 1-propoxy-2-propanol to prepare a spin-on-glass (SOG) material for the trilayer imaging process. The material was found to be stable enough for industry use. Minor amounts of methylsilsesquioxane and photoacid generators were introduced into the material. Thin resist (top layer) patterns were imaged on the SOG film (intermediate layer), which was coated on a hard-baked i-line resist (bottom layer). The SOG film showed sufficient adhesion to the resist patterns, and superior resist profiles were imaged on the film. This study involved multiple reactions and reactants, such as Ethyl 3-ethoxypropanoate (cas: 763-69-9Formula: C7H14O3).
Ethyl 3-ethoxypropanoate (cas: 763-69-9) belongs to esters. Esters are also usually derived from carboxylic acids. It may also be obtained by reaction of acid anhydride or acid halides with alcohols or by the reaction of salts of carboxylic acids with alkyl halides. Liquid esters of low volatility serve as softening agents for resins and plastics. Esters also include many industrially important polymers. Polymethyl methacrylate is a glass substitute sold under the names Lucite and Plexiglas; polyethylene terephthalate is used as a film (Mylar) and as textile fibres sold as Terylene, Fortrel, and Dacron.Formula: C7H14O3
Referemce:
Ester – Wikipedia,
Ester – an overview | ScienceDirect Topics