Novel photoacid generators for chemically amplified resists was written by Yamato, Hitoshi;Asakura, Toshikage;Matsumoto, Akira;Ohwa, Masaki. And the article was included in Proceedings of SPIE-The International Society for Optical Engineering in 2002.HPLC of Formula: 763-69-9 The following contents are mentioned in the article:
Recently we have developed new class of non-ionic oxime sulfonate PAG. The compounds generate various kinds of sulfonic acids, such as n-propane, n-octane, camphor and p-toluene sulfonic acid under Deep-UV exposure and are applicable for chem. amplified (CA) photoresists. The application-relevant properties of the compounds such as solubility in propylene glycol monomethyl ether acetate (PGMEA), Et lactate, Et 3-ethoxypropionate, and 2-heptanone, UV absorption, thermal stability with or without poly(4-hydroxystyrene) (PHS), storage stability in a neat form or in PGMEA solution with or without additives, sensitivity in a model resist formulation, dissolution inhibition efficiency during the development process and volatility were evaluated. The compounds exhibit good solubility in PGMEA, high sensitivity in pos. tone CA resist formulations, with Deep-UV exposure, and no significant volatility. Especially it was found that the compounds are superior in terms of thermal stability and storage stability, i.e., high thermal stability up to 188 degree(s)C in a phenolic matrix, and no change during storage in PGMEA at 60 degree(s)C for 5 mo. This study involved multiple reactions and reactants, such as Ethyl 3-ethoxypropanoate (cas: 763-69-9HPLC of Formula: 763-69-9).
Ethyl 3-ethoxypropanoate (cas: 763-69-9) belongs to esters. Esters are widespread in nature and are widely used in industry. In nature, fats are in general triesters derived from glycerol and fatty acids. Esters are responsible for the aroma of many fruits, including apples, durians, pears, bananas, pineapples, and strawberries. Acyl chlorides and acid anhydrides alcoholysis is another way to produce esters. Acyl chlorides and acid anhydrides react with alcohols to produce esters. Anydrous conditions are recommended since both acyl chlorides and acid anhydrides react with water.HPLC of Formula: 763-69-9
Referemce:
Ester – Wikipedia,
Ester – an overview | ScienceDirect Topics